Focused Xe-ion beam microfabrication of pillar for magnetic actuation on microscale

( L. Straka, L. Klimša, J. Kopeček,  D . Musiienko )

See how prototype MSM microdevices can be fabricated using focused Xe-ion beam. The fabricated pillar exhibit magnetic actuation with nearly 6% strain.

Joint work of Institute of Physics of the Czech Academy of Sciences, Czech Republic
and Material Physics Laboratory, Lappeenranta University of Technology, Finland.

For details, see this scientific article: .