Focused Xe-ion beam microfabrication of pillar for magnetic actuation on microscale
( L. Straka, L. Klimša, J. Kopeček, D . Musiienko )
See how prototype MSM microdevices can be fabricated using focused Xe-ion beam. The fabricated pillar exhibit magnetic actuation with nearly 6% strain.
Joint work of Institute of Physics of the Czech Academy of Sciences, Czech Republic
and Material Physics Laboratory, Lappeenranta University of Technology, Finland.
For details, see this scientific article: